Ultra-low voltage MEMS switch using a folded hinge structure
نویسندگان
چکیده
منابع مشابه
Ultra low actuation voltage RF MEMS switch
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ژورنال
عنوان ژورنال: Micro and Nano Systems Letters
سال: 2014
ISSN: 2213-9621
DOI: 10.1186/s40486-014-0002-y